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EM-5186 Double-side alignment mark placement system
Sector: Optics-mechanical Equipment
Price: Contract Price
Full Product Information:The EM-5186 system is designed for mark placement on the bottom side of the wafer (substrate). The mark is aligned with alignment marks on the top side of the wafer (substrate). The system allows to manufacture double side lithography wafers (substrates) with traditional lithography equipment. The tool can be used for manufacturing of semiconductor devices, hydrid, optical, optoelectronic and other devices, MEMS, MOEMS. EM-5186 allows to form marks on transparent substrates.