Automated defect inspection system EМ-6015M

Sector: Optics-mechanical Equipment
Price: Contract Price
Full Product Information:
The tool is intended for automated detection of defects and debris on mask including masks protected on both sides with pellicles and wafer surfaces. The inspection combines light and dark field illumination modes in reflected and transmitted light. Main features: - automated operation, user programmed inspection route; - automated defect data processing (image, coordinates, dimensions) with data saving to database; - automatic focusing; - extended focal distance lenses; - touch screen; - design modularity.

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